Layer
Thickness, µm
Density, x103 kg/m3
Overglass
1
2.5
Metal2
1.15
2.7
Ox2
0.65
Metal1
0.6
Ox1
0.85
Poly2
0.4
2.3
Polyox
0.08
Poly1
FOX+ThinOx
? 5.63
№
Total thickness, µm
z, position of poly
Ч
1.25
-0.025
2
1.45
-0.125
3
1.6
-0.2
4
3.1
-0.95
Specification
Value
ADXL50
Unit
Device size, approx.
1x1x-
9.4x9.4x24.2
mm
Seismic mass
3.6
-
Dynamic range
-100~100
-50~50
g
-980~980
-490~490
Sensitivity
Resolution
0.66
Noise
Frequency range
Up to 15
Up to 10
kHz